Method and Apparatus for Two-Axis, High-Speed Beam Steering

ABSTRACT

Dual axis, beam-steering devices are disclosed. An exemplary device includes a support platform having a top surface. A reflective surface is coupled to the top surface of the support platform. First and second galvanometers are coupled via respective linkages to the support platform such that the first galvanometer rotates the support platform about a first rotational axis, and the second galvanometer rotates the support platform about a second rotational axis that is orthogonal to the first rotational axis. The support platform can be simultaneously rotated with respect to both the first rotational axis and the second rotational axis to steer a beam of electromagnetic energy (e.g. light beam) reflected by the reflective surface.

GOVERNMENT FUNDED INVENTION

The present invention was made with U.S. Government support under Agreement No. EPS0132556 awarded by the National Science Foundation. The U.S. Government has certain rights in this invention.

FIELD OF THE INVENTION

This invention relates to the field of beam steering where light from an illumination source is directed at high rates to a destination. Particular applications include laser scanning confocal microscope, optical scanning, optical particle tracking and light projection systems.

BACKGROUND OF THE INVENTION

A number of emerging technologies are incorporating photonics. Among these are optical imaging, telecommunications, entertainment devices, image projection systems, medical diagnosis and treatment, photolithography, materials inspection, biosensors, and surveillance. Applications of these technologies share a requirement for the rapid and accurate scanning of a laser beam either to image an object or to project light onto a surface.

When dynamic systems and processes are imaged optically, the rate of image acquisition (i.e. number of image frames acquired per unit time) is an important consideration. Such systems may involve stationary objects that change over time, specimens that move spatially within a field-of-view, or both processes occurring simultaneously. Many important processes occur within time domains that are less than one second, and in such cases, it is frequently desirable to acquire images in at least two spatial dimensions as rapidly as is consistent with sampling sufficient photons to form an acceptable image.

Many imaging applications of dynamic systems and processes also require optimal spatial resolution. Laser scanning confocal microscopy is commonly used to improve this parameter, particularly in the (z) dimension parallel to the optical axis. In scanning microscope systems, such as laser scanning confocal systems, the illuminating light or specimen must be moved relative to one another. This can be accomplished by moving the specimen while keeping the light in a fixed position, by moving the light across the specimen while the latter is kept stationary, or by a moving both the illumination light and the specimen. Certain optical advantages can be achieved by keeping the illumination light stationary and moving the specimen (for example see U.S. Pat. No. 3,013,457, which provides the original description of a confocal optical system). However, this approach involves moving the relatively large mass of a microscope stage or another type of inspection platform, which typically prevents scanning at rates greater than a few frames per second. In addition, this approach restricts use of immersion objectives, where an intermediate layer of an appropriate medium, such as oil, water, or glycerin, must be maintained between the objective and the specimen. Because of such limitations, it is common to scan the illumination light (typically a laser beam) over the specimen in a two-dimensional raster pattern (involving one dimensional lines repeated with intervening steps in the orthogonal dimension) in the majority of modern scanning microscopes. The laser beam is scanned using mirrors mounted on devices capable of controlled motion, such as galvanometers, piezoelectric elements or microelectromechanical system (MEMS) micro-mirrors. In another approach, stationary devices, such as acustooptical beam deflectors (AOD), which use changes in refractive index to alter the path of the light beam, have been implemented as beam-steering devices. However, each of these beam-steering devices is constrained by limitations related to achievable scan rates and/or optical properties.

Galvanometers are currently the beam-steering device most commonly employed in scanning optical systems. Mirrors mounted on two independent galvanometers are used to achieve beam steering in two (x and y) spatial dimensions. Closed loop galvanometer pairs have been used most frequently to take advantage of the ability to modulate and control the position of each mirror as it is moved back and forth in a single dimension in an accurate manner that is inherent to this type of device. In addition, closed-loop galvanometers typically have position feedback signals, which can be used to verify the position of the mirror at a given point in time. However, the frequency response of this type of galvanometer is limited (generally to <1 kHz) by several factors and this restricts image acquisition rates to typically less than video rates. These factors include the extent of mechanical movement of the mirror and the size and, therefore, the mass of the reflective surface required, and ultimately, the time required to dissipate heat resulting from the electromagnetic forces used to drive movements of the mirror. All of these factors are inversely related to the frequency response of the galvanometer system. In another approach, resonant galvanometers, which due to lower friction associated with their movement, can be driven at frequencies of up to ˜8 kHz, have been used to deflect a laser beam in one spatial dimension, while a slower (30-60 Hz) closed loop galvanometer is used to deflect the beam in the second spatial dimension. Using this combination of galvanometers, acquisition rates of 30-60 frames/sec have been achieved for two-dimensional images. (For examples see: Tsien and Bacskai, Video-Rate Confocal Microscopy, Ch. 29 in Handbook of Biological Confocal Microscopy, 2^(nd) ed., J. B. Pawley, Ed., Plenum Press, New York, 1995 and U.S. Pat. No. 5,283,433)

Prior-art systems cannot place the axis of a primary deflection surface in a telecentric conjugate image plane when using two mirrors. The need to utilize physically separate mirrors in galvanometer-based systems to steer the laser beam in two spatial dimensions in galvanometer-based systems imposes optical limitations (for example see discussion by E. H. K. Stelzer in: The Intermediate Optical System of Laser-Scanning Confocal Microscopes, Ch. 9, in Handbook of Biological Confocal Microscopy, 2^(nd) ed., J. B. Pawley, Ed., Plenum Press, New York, 1995). In imaging situations, where laser scanning confocal microscope systems utilizing single photon excitation are used, it is necessary to sense light originating in the sample, such as fluorescent or reflected light, using a fixed spot detector, such as a photomultiplier tube or photodiode. To focus light from the sample onto a fixed point, it must be de-scanned by the beam-steering device. Such de-scanning is optimal when the axis of the primary deflecting surface is placed at a telecentric conjugate image plane. However, such placement is not possible when separate reflective surfaces are used to deflect the beam in each of the two dimensions. Placement of the reflective surfaces in an axial parallel arrangement reduces, but does not eliminate the associated optical distortion. Consequently, it is preferred to utilize a single reflective surface to deflect the beam in both spatial dimensions.

Another approach to rapid, single-axis laser beam deflection involves the use of an acustooptical beam deflector (AOD). As noted previously, this device uses changes in refractive index to deflect the beam rapidly (with a 1-5 kHz frequency range) in one spatial dimension. As is the case for the resonant galvanometer, a second device is required to deflect the beam in the second spatial dimension. In addition, although scanning systems utilizing AOD devices have achieved high scan rates over a somewhat limited range of deflection angles, use of the AOD introduces optical disadvantages, particularly when used with laser scanning confocal microscope systems. These disadvantages include reduced transmission efficiency, wavelength dependent angles of deflection, and the inability of light emitted from the sample at wavelengths greater than that shone on the sample (e.g. fluorescence) to be de-scanned by the AOD device along the optical path used by the illuminating light. Additional optics are required to reduce the impact of these disadvantages on spatial resolution and this decreases the optical efficiency that can be achieved.

High-rate (1-10 kHz frequencies), 2-axis beam deflection has been achieved using electrostatically actuated MEMS micro-mirror beam-steering devices. However, the low level of torque produced by these devices limits the size of the reflective surface to typically <1 mm. Such a small clear aperture limits the achievable spatial resolution to much less than that of confocal systems currently available commercially, and places important limitations on the properties of the intermediate optical system that can be used. Increasing the size of the mirror results in marked reductions in scan frequency and increases in dynamic deformations of reflective surfaces. These deformations diminish the quality of the reflected light and thus, the optical quality of acquired images.

Thus, there is currently a need for a 2-axis beam-steering device having a single, large reflective surface.

SUMMARY OF THE INVENTION

The present invention provides 2-axis beam-steering devices having large clear apertures capable of deflecting laser beams or other illumination sources in two dimensions with a frequency response in the kHz range. The present invention involves the use of micro-machined and/or semiconductor structures to formula reflector platform hybridized with closed-loop galvanometers to achieve rapid beam-steering movements. An advantage of the invention is that it permits the use of galvanometer actuators having suitable torque generating capabilities to drive a single reflective surface in two spatial axes. Galvanometers are particularly well suited for being driven by amplitude-modulated sine waves employed as mirror position command signals as described in U.S Utility patent application Ser. No. 10/795,205, filed Mar. 4, 2004, incorporated herein by reference in its entirety, to extend achievable frequency ranges. In addition, the use of the single reflective surface operating in a dual-axis mode optimizes the achievable spatial resolution. A further advantage of the invention is the generation of dual-axis position feedback signals that can be used to monitor and further increase the accuracy of beam-steering. Implementation of these devices in a laser scanning confocal microscope system (LSCMS) is described as a preferred embodiment.

BRIEF DESCRIPTION OF THE DRAWINGS

The present invention is depicted in the drawings and will be described below with reference to the Figures, in which:

FIG. 1 shows an embodiment of a beam-steering device with two galvanometers and an optical position feedback system in x and y axes located under the mirror platform;

FIG. 2 shows an embodiment of a beam-steering device with two galvanometers and capacitive feedback in x and y axes from comb devices attached to linkages;

FIG. 3 shows a beam-steering device in which four galvanometric motors have been incorporated;

FIG. 4 shows a three-dimensional close-up view the mirror platform region in which linkages are composed of widely separated spring structures;

FIG. 5 shows a three-dimensional close-up view the mirror platform region in which four slip-joint linkages (with internal pins) are used; and

FIG. 6 shows a schematic top-view (upper panel) of the slip-joint beam-steering structure illustrated in FIG. 5 along with a schematic side-view (lower panel) of a method to construct an appropriate slot within the platform linkage insert.

DETAILED DESCRIPTION OF THE INVENTION

In an embodiment, the present invention provides a 2-axis, beam-steering device having the following properties:

-   A reflective surface having a minimum width of 3 mm. -   A high reflective surface fill factor (close or equal to 100%). -   A highly reflective surface (such as generated using metal or     dielectric coatings). -   Minimal spatial deformation either under static conditions or as a     result of dynamic movements. -   Capable of deflecting a beam over a total mechanical angle of at     least 4° (mechanical). -   Capable of deflecting a beam at frequencies >1.5 kHz. -   Capable of being driven by different types of command signals     including those necessary for raster scanning and ones consisting of     amplitude-modulated sine or modified sine wave functions.

Devices that meet or exceed these criteria are described below. The torque required to move a large mirrored surface through a significant mechanical angle can be achieved using two or more closed-loop galvanometers to drive a single reflective surface. An example of a suitable galvanometer is Model 6215 commercially available from Cambridge Technology (Cambridge, Mass.). With modifications to the electronic control circuitry, cooling of the galvanometer case to increase heat transfer and use of “intelligent control” non-raster command signals, the frequency response of these galvanometers can be extended to exceed 5 kHz.

In one embodiment of a beam-steering device shown in FIG. 1, two galvanometers 101, 102 are mounted orthogonally to one another. Energy is transmitted to the support platform 104 by rotation of the central shafts 105 of each galvanometer 101, 102. Dissipation of thermal energy generated by operation of the galvanometers is accelerated by a heat sink 103 in which cooled water enters an interior chamber via an inlet 108, flows around the casings of the galvanometers 101, 102 and exits via an outlet 109 where it can be chilled and re-circulated. The heat sink block, typically made from aluminum, serves both to dissipate heat from the structure and as a structural support for the overall device.

A reflective surface (not shown) being one of a variety of shapes (typically round or square) is attached (via its non-reflective side) to the support platform 104 where the center of the reflective surface is aligned to the center of the support platform 104. One galvanometer 101 rotates the support platform 104 and attached mirror to generate beam steering in the x-direction. The other galvanometer 102 rotates the same mirror platform 104 and attached mirror to generate beam steering in the y-direction. The combined movements of both galvanometers produce a tip-tilt motion of the mirror platform 104 capable of deflecting a beam simultaneously in both the x- and y-axes.

The shaft of each galvanometer 105 is attached via linkages 106 to the support platform 104. The linkage is stiff and noncompliant in the direction of rotation of the attached galvanometer, but permits movement in the orthogonal axis (i.e. in and out of the plane of the figure shown in FIGS. 1-6). The change in length of a linkage 106 required to accommodate this orthogonal motion is permitted by inclusion of one or more spring mechanisms 107 in the linkage between its junctions with the shaft of the galvanometer and the support platform 104.

The actual position of the deflected beam in 2-dimensional space can be determined from reflector position feedback signals. During imaging applications, such signals are recorded concomitantly with intensity values obtained for light originating from the sample. Several options are available to generate such position signals. They can be obtained from galvanometer shaft position feedback signals typically available on the galvanometers. A more accurate (i.e. more closely aligned with actual beam direction) reflector position feedback signal can be obtained optically by detecting the position of light reflected off a surface of the reflector or by making capacitive measurements between the fixed platform 110 and the moveable reflector and its support platform 104. These options are illustrated schematically in FIG. 1 where elements to sense x position 115 and y position 116 of the mirror are located beneath the support platform 104.

Another option is to measure capacitive changes between electrostatically-charged silicon comb-finger structures attached via linkages to the moveable support platform 104. This position-sensing scheme has been used by Milanovic et al. and is illustrated in FIG. 2. Capacitance changes between the silicon comb-finger structures sensing the x-direction 113 and y-direction 114 are proportional to tip-tilt angle. In each of the feedback schemes, electrical signals to extract position on the silicon or semiconductor platform 110 are transmitted to external circuitry via wire-bond pads for the x-direction 111 and y-direction 113.

Should it be desired to generate more torque than can be supplied by a single galvanometer in order to further increase the frequency response of beam-steering devices, additional galvanometers can be placed in the same rotational axis on opposing sides of the mirror as shown in FIG. 3. This effectively doubles the applied actuator torque and attachment to opposing galvanometers also serves to stabilize the position of the mirror platform by generating symmetrical loads. The galvanometers are wired in opposite directions (i.e. +and − leads are reversed) so that the direction of rotation is opposite (clockwise versus counter-clockwise) for the same applied voltage in each axis (i.e. 202 wired the opposite of 204 in the x-axis and 201 wired the opposite of 205 in the y-axis of FIG. 3).

The use of four galvanometric drives can be applied to most of the variations of the beam steering devices. The use of two galvanometers is a less expensive design if maximum frequency response is not necessary for particular applications. In some two-galvonometer designs, it is advantageous to stabilize at least one the sides of the reflector opposite to those attached to the galvanometers along the axis of the galvanometer linkages. This can be accomplished using identical linkages 106 to the galvanometer sides of the platform. Allowing these passive support linkages to rotate freely (with or without bearings) can stabilize the non-drive side(s) of the platform. The dashed lines in the vicinity of 218 (x-axis) and 217 (y-axis) in FIG. 6 indicate this option.

FIG. 4 shows a close-up view of a square reflector beam-steering platform 226 in which the linkages 225 surrounding the platform are widely separated along each rotational axis. The ends of the rotational shaft portions of the linkages are represented by rectangular blocks 227. Splitting the linkages in each direction into two components and spacing them as far apart as possible (within the dimensions of the platform), improves the transfer of rotational energy from the galvanometer shafts 227 to the reflector platform 226 without significantly sacrificing linkage compliance to allow movements in the orthogonal axis.

A second general embodiment of a reflector platform and linkages is illustrated in FIG. 5. In the designs described above, most of the rotational energy provided by the galvanometers to the reflector platform is converted to potential energy stored by deforming the linkages, where care must be given to not cause permanent deformation (e.g. breakage). The amount of potential energy consumed by the system can be described in terms of the degree of deformation and the spring constants of the structures involved in linking the galvanometers to the reflector platform. The generation of potential energy (i.e. energy required to be generated by the galvanometers) can be greatly reduced by allowing surfaces to move relative to one another. Assuming frictional losses are low, this can, under some conditions, produce more rapid movements for a given input power. The disadvantage of this approach is the possibility of detrimental wear on the moving surfaces during prolonged use.

An example of a beam-steering design that can transfer rotational commands in x and y axes, while simultaneously allowing tip-tilt movements in both axes is shown in FIG. 5. In this case, the rotational shaft of each galvanometer has a “U-shaped” end 220 which can accept an insert 221 from the beam-steering platform. A pin (206) that fits through both a hole in the rotational shaft and the slot in the insert stabilizes the platform by limiting unwanted platform movements relative to the galvanometer shaft. The “U-shaped” end 220 transfers rotational energy from the shaft to the platform. Together, end 220 and insert 221 form a rotational translator that allows simultaneous rotation of the platform in x and y axes. The break-out diagrams at the bottom of FIG. 5 show a 3-dimensional perspective view of one such insert 221, “U-shaped” shaft end 220 and pin 206.

The upper panel of FIG. 6 shows a close-up, top-view schematic of the beam-steering device illustrated in FIG. 5. In FIG. 5 and FIG. 6, the ends of the galvanometers are shown as rectangular blocks where 215 (and optionally 218) generate torque in the x axis and 216 (and optionally 217) generate torque in the y axis. The slots within the platform inserts 221 must have a curvature suitable to accommodate the rotational motions of the platform. The vertical dashed lines that project to from the leftmost insert to a side-view of the insert shown in the bottom panel of FIG. 6 indicate how the radial curved slot can be formed. The radius of curvature corresponds to the distance from the slot to the center of the platform 210. The thick circle 211 represents a hypothetical slot that would allow the platform to rotate completely around, 360° (mechanical). In practice, the angle that must be accommodated 212 is typically up to ±15° (mechanical). Thus, the portion of the thick circle 211 that overlaps with this angular range corresponds to the material that must be removed from the insert to form the slot as depicted in insert 221.

Finite element analysis is used to optimize the dimensions and chose the materials properties of the linkages for the size and mass of the reflective surface needed for particular applications. FIG. 4 and FIG. 5 were generated and the motions of the depicted devices were simulated using ANSYS (Canonsburg, Pa.), an example of such a finite element modeling software tool. The linkages, mirror support platform and other components of the beam-steering device can be constructed from silicon using well-established, silicon-on-insulator (SOI) fabrication techniques. Alternatively, components can be created using micro-machining techniques, similar to methods employed to construct parts for watches. The mirrored surfaces can be fabricated from a single crystalline silicon substrate or polished metal platform. Alternatively, commercially available conventional thin metal or dielectric-coated reflectors can be attached to the support platforms. 

1. A two spatial axes electromagnetic radiation directing device, comprising: a single reflective surface capable of tip-tilt movement; and a set of closed-loop galvanometers actuators.
 2. The device of claim 1, wherein the position feedback signals from said device are used to establish the position of the radiation at any time.
 3. The device of claim 1, further comprising: a support platform having a top surface and at least one side surface; wherein the reflective surface is attached to the top surface of the support platform; a first galvanometer attached via a first linkage to the side surface of the support platform; a second galvanometer attached via a second linkage to the side surface of the support platform, substantially orthogonal to the first galvanometer with respect to the support platform, such that the first galvanometer rotates the support platform with respect to a first axis, and the second galvanometer rotates the support platform with respect to a second axis, the first axis orthogonal to the second axis, wherein the support platform can be simultaneously rotated with respect to both the first axis and the second axis to steer a beam of electromagnetic energy reflected by the reflective surface.
 4. The device of claim 3, wherein the first galvanometer comprises a first active drive, the first active drive defining a position of the first linkage, and the second galvanometer comprises a second active drive, the second active drive defining a position of the second linkage, such that the first active drive and the second active drive together provide position information describing a position of the reflective surface with respect to the first axis and the second axis.
 5. The device of claim 4, further comprising a position sensing means, the position sensing means determining a position of the reflective surface with respect to the first axis and the second axis.
 6. The device of claim 5, wherein the position sensing means comprises means for reading position feedback signals received from the first and second galvanometers.
 7. The device of claim 5, wherein the position sensing means comprises means for optically detecting energy reflected off a surface of the reflective surface.
 8. The device of claim 5, further comprising a fixed support structure, wherein the position sensing means comprises means for making capacitive measurements between the support platform and the fixed platform.
 9. The device of claim 5, wherein the position sensing means comprises a electrostatically-charged silicon means.
 10. The device of claim 4, further comprising a first plurality of silicon combs for sensing a first position of the first galvanometer shaft and a second plurality of silicon combs for sensing a second position of the second galvanometer shaft, the first plurality and the second plurality together providing position information for the mirror with respect to the first axis and the second axis.
 11. The device of claim 3, further comprising a first passive linkage connecting a fixed platform to the side surface of the support opposite from the first linkage's attachment location on the side surface with respect to the support platform along the first axis.
 12. The device of claim 11, further comprising a second passive linkage connecting the fixed platform to the side surface of the support opposite from the second linkage's attachment location on the side surface with respect to the support platform along the second axis.
 13. The device of claim 11, further comprising a third galvanometer attached via a third linkage to the side surface of the support platform opposite from the attachment location of the first galvanometer linkage with respect to the support platform along the first axis.
 14. The device of claim 13, further comprising a fourth galvanometer attached via a fourth linkage to the side surface of the support platform opposite from the attachment location of the second galvanometer linkage with respect to the support platform along the second axis.
 15. The device of claim 14, wherein the third galvanometer is wired in a first direction and the fourth galvanometer is wired in a second direction, the second direction opposite from the first direction.
 16. The device of claim 3, wherein the first galvanometer is wired in a first direction and the second galvanometer is wired in a second direction, the second direction opposite from the first direction.
 17. The device of claim 3, further comprising a heat sink device, the heat sink device in sufficient contact with the first galvanometer and the second galvanometer to remove heat from the first galvanometer and the second galvanometer.
 18. The device of claim 3, wherein the first linkage and the second linkage each comprises a first section and a compressible means positioned between the linkage shaft and the support platform, the compressible means allowing a variable combined length of the first section and the compressible means.
 19. The device of claim 3, wherein the support platform has a substantially rectangular shape defined by a first side portion, a second side portion, a third side portion, and a fourth side portion.
 20. The device of claim 19, wherein the first linkage is noncompliant in rotation about the second axis and has a varying length to permit rotation of the support platform about the first axis and wherein the second linkage is noncompliant in rotation about the first axis and has a varying length to permit rotation of the support platform about the second axis.
 21. The device of claim 3, wherein the first and second linkages each have a connecting interface, the connecting interface receiving an insert from the support platform and securing the insert to the interface via a pin, the pin fixed to the connecting interface and extending through the received insert, wherein the insert having a curved slot that allows the pin to engage the insert at various positions along an angular range within the curved slot.
 22. The device of claim 3, wherein the support platform comprises silicon.
 23. The device of claim 3, wherein the first and second linkages comprise silicon.
 24. The device of claim 13, wherein the third linkage comprises silicon.
 25. The device of claim 14, wherein the fourth linkage comprises silicon.
 26. The device of claim 3, wherein the reflective surface comprises a dielectric coating.
 27. The device of claim 3, wherein the reflective surface comprises a metal coating.
 28. The device of claim 3, wherein the reflective surface can be rotated over a total mechanical angle of at least four degrees.
 29. The device of clam 3, wherein the reflective surface can be rotated at a frequency of at least 1.5 kHz.
 30. The device of claim 3, wherein the reflective surface has a minimum width of three millimeters.
 31. A method of steering a beam of electromagnetic energy with respect to two spatial axes, the method comprising: directing a beam of electromagnetic energy to a reflective surface; and actuating a plurality of galvanometers to manipulate the reflective surface in a tip-tilt movement to direct the beam of electromagnetic energy.
 32. The method of claim 31, wherein actuating a plurality of galvanometers comprises the first galvanometer rotating the reflective surface with respect to a first axis, a second galvanometer rotating the reflective surface with respect to a second axis, wherein the first axis is orthogonal to the second axis.
 33. The method of claim 31, further comprising generating feedback signals that describe a direction of the directed beam.
 34. The method of claim 33, wherein the feedback signals describe the direction of the directed beam with respect to the first axis.
 35. The method of claim 33, wherein the feedback signals describe the direction of the directed beam with respect to the second axis. 